Learning about Front Opening Universal Pod (FOUP)

What is FOUP?

The Front Opening Universal Pod or FOUP is the exclusive plastic enclosure used for handling the silicon wafers in a safe and secure environment. FOUP is also known by another name, Front Opening Unified Pod. The main purpose of this device is to designate the wafers in the machines for increasing the processing performance. FOUP opener is used to check for any abnormalities by opening the lid. 3000mm FOUP was developed in the mid-1990s as the wafer processing tool. Many businesses design their FOUPs in various color combos, and the product sizes vary as per the brand.

Also, FOUP, as well as IC processing equipment, can provide the nitrogen ecosystem for boosting the device productivity. Earlier, engineers were able to develop only the 300mm FOUP with the detachable cassette, which was used to place the wafer in the right position. With the advancement in technology, 400 mm wafer FOUP load ports are easily accessible from the robotics laboratory. It allows the swapping of doors from front to back so that the robot mechanism can obtain the wafer from the FOUP. Apart from that, the FOUP comprises of many holes, coupling plates, pins, which can be used by the automatic material handling system and can locate over the load port. 

The sealing capacity of 300mm FOUP is amazing, and it has a great design. It offers clean, safe, and secure wafer transport, integration as well as optimum automation at an effective cost. For the purpose of analyzing data, wafer handling software is mostly used.

How to Control Humidity in a Mini-Environment With FOUP?

With the FOUP (Front Opening Universal Pod), the placement of the wafer is done when the production chain is on the waiting mode. This approach is a traditional one for removing the contamination. The FOUP is cleaned with the gas, and the cleanliness level inside the machine is maintained. How is it done? The very first step is the CDA (Clean dry air) supplies the air curtain and purge system. When the flow of clear air gets transferred to the FOUP door, it automatically stops the moisture from going inside. In the initial pre-purged FOUP, around 0% RH (relative humidity) is found. But, the ratio of relative humidity or RH in the mini-environment has been seen up to 43%. It should be taken care that if the door of FOUP is not closed, it quickly holds the moisture without using an air curtain or a purge system. In addition to that, the CDA is of great importance to decrease the relative humidity, and it is doable with the extensive diffuser panel purge processes. In order to protect the moisture in FOUP, make sure the CDA rate of panel-purge equipment should be around 250 L/min and 150 L/min should be the air curtain flow rate.

How using the 300 mm FOUP Wafer, Load Port prove beneficial?

• The 300mm FOUP load port presents complete compatibility for all SEMI standard FOUPs.
• There is no need for door and plate alignment with the 300mm FOUP.
• The SEMI Complaint, ROHS Compliant, and CE certification ensure high-level performance. 
• The repeatable precision movements can be performed with the DSP operated pneumatic closed-loop or electro-mechanical servos.
• It comes with bearings and lubrication-free screws.
• The programmable buttons, lights, AMHS options, Barcode, RFID, OCR scanning, class 1 cleanliness are some of the strong characteristics of 300mm FOUP.

Are you looking for the wafer handling solutions, precision motion control stages, and 300mm FOUP load port wafer handling systems for maximizing the life of equipment? Get in touch with Kensington Labs that have years of experience in wafer making instruments and robot repairing. The aim of Kensington is to provide the most reliable, innovative, and outstanding wafer handling robots, end-effectors, ADOs, and aligners at an affordable price. The company is always ready to provide innovative solutions to its clients at the best prices.