A Detailed Study of FOUP, 300mm FOUP Load Port Wafer Handling Robot
What is FOUP? The FOUP is defined as Front Opening Universal Pod, which is the exclusive plastic enclosure equipped for handling the silicon wafers in a safe environment. The other name of FOUP is the Front Opening Unified Pod. The primary purpose of this device is to allocate the wafers in the machines to increase the processing performance. In the mid-1990s, 3000mm FOUP was developed as the wafer processing tool. Many companies design their FOUPs in different color combos, and their product sizes also vary according to the brand. In addition, IC processing equipment and the FOUP can provide the nitrogen ecosystem to boost the device productivity. Previously, the engineers may only develop the 300mm FOUP with the detachable cassette to place the wafer in the right position. But now, 400 mm wafer FOUP load ports are also easily accessible from the robotics laboratory. It may allow the swapping of doors from front to bottom so that robot mechanisms can access the wafer from the FOU